Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Ianno, Natale, Langell, Marjorie, Schubert, Eva, and Schubert, Mathias. Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. Retrieved from https://par.nsf.gov/biblio/10166671. Scientific Reports 10.1 Web. doi:10.1038/s41598-020-66409-8.

Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Ianno, Natale, Langell, Marjorie, Schubert, Eva, & Schubert, Mathias. Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry. Scientific Reports, 10 (1). Retrieved from https://par.nsf.gov/biblio/10166671. https://doi.org/10.1038/s41598-020-66409-8

Kilic, Ufuk, Mock, Alyssa, Sekora, Derek, Gilbert, Simeon, Valloppilly, Shah, Ianno, Natale, Langell, Marjorie, Schubert, Eva, and Schubert, Mathias. "Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry". Scientific Reports 10 (1). Country unknown/Code not available. https://doi.org/10.1038/s41598-020-66409-8. https://par.nsf.gov/biblio/10166671.

@article{osti_10166671,
place = {Country unknown/Code not available}, title = {Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry}, url = {https://par.nsf.gov/biblio/10166671}, DOI = {10.1038/s41598-020-66409-8}, abstractNote = {}, journal = {Scientific Reports}, volume = {10}, number = {1}, author = {Kilic, Ufuk and Mock, Alyssa and Sekora, Derek and Gilbert, Simeon and Valloppilly, Shah and Ianno, Natale and Langell, Marjorie and Schubert, Eva and Schubert, Mathias}, }