Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force
- Award ID(s):
- 1608692
- PAR ID:
- 10169410
- Date Published:
- Journal Name:
- Nonlinear Dynamics
- Volume:
- 100
- Issue:
- 3
- ISSN:
- 0924-090X
- Page Range / eLocation ID:
- 1927 to 1940
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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