Modeling and Characterization of a Pull-in Free MEMS Microphone
- Award ID(s):
- 1608692
- PAR ID:
- 10169474
- Date Published:
- Journal Name:
- IEEE Sensors Journal
- Volume:
- 20
- Issue:
- 12
- ISSN:
- 1530-437X
- Page Range / eLocation ID:
- 6314 to 6323
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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