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Title: Modeling and Characterization of a Pull-in Free MEMS Microphone
Award ID(s):
1608692
PAR ID:
10169474
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
IEEE Sensors Journal
Volume:
20
Issue:
12
ISSN:
1530-437X
Page Range / eLocation ID:
6314 to 6323
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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