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Title: Predictive Control of Nano-positioning Stage Using Recurrent-neural-network-based Inversion Model
Award ID(s):
1751503 1634592
PAR ID:
10177915
Author(s) / Creator(s):
;
Date Published:
Journal Name:
2019 IEEE 58th Conference on Decision and Control (CDC)
Page Range / eLocation ID:
7764 to 7769
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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