Full-chip wire-oriented back-end-of-line TDDB hotspot detection and lifetime analysis
- Award ID(s):
- 1816361
- PAR ID:
- 10195470
- Date Published:
- Journal Name:
- Integration
- Volume:
- 70
- Issue:
- C
- ISSN:
- 0167-9260
- Page Range / eLocation ID:
- 90 to 98
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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