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Title: Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
Award ID(s):
1640959
PAR ID:
10196470
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
115
Issue:
24
ISSN:
0003-6951
Page Range / eLocation ID:
241101
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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