Controlled Single-Cell Compression With a High-Throughput MEMS Actuator
- Award ID(s):
- 1631656
- NSF-PAR ID:
- 10201296
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 29
- Issue:
- 5
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 790 to 796
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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