We report on the design, fabrication, and experimental characterization of photonic crystal (PhC) nanobeam cavities with the smallest footprint, largest intrinsic quality factor, and smallest mode volume to be demonstrated to date in a monolithic CMOS platform. Two types of cavities were designed, with opposite spatial mode symmetries. The opposite mode symmetry, combined with evanescent coupling, allows the nanobeam cavities to be used in reflectionless topologies, desirable in complex photonic integrated circuits (PICs). The devices were implemented and fabricated in a 45 nm monolithic electronics–photonics CMOS platform optimized for silicon photonics (GlobalFoundries 45CLO) and do not require any post-processing. Quality factors exceeding 100 000 were measured for both devices, the highest, to the best of our knowledge, among fully cladded PhC nanobeam cavities in any silicon-on-insulator (SOI) platform. Additionally, the ability of the cavities to confine light into small mode volumes, of the order of (
We propose a novel photonic circuit element configuration that emulates the through-port response of a bus coupled traveling-wave resonator using two standing-wave resonant cavities. In this “reflectionless resonator unit”, the two constituent cavities, here photonic crystal (PhC) nanobeams, exhibit opposite mode symmetries and may otherwise belong to a single design family. They are coupled evanescently to the bus waveguide without mutual coupling. We show theoretically, and verify using FDTD simulations, that reflection is eliminated when the two cavities are wavelength aligned. This occurs due to symmetry-induced destructive interference at the bus coupling region in the proposed photonic circuit topology. The transmission is equivalent to that of a bus-coupled traveling-wave (e.g. microring) resonator for all coupling conditions. We experimentally demonstrate an implementation fabricated in a new 45 nm silicon-on-insulator complementary metal-oxide semiconductor (SOI CMOS) electronic-photonic process. Both PhC nanobeam cavities have a full-width half-maximum (FWHM) mode length of 4.28
- Award ID(s):
- 2023751
- NSF-PAR ID:
- 10201629
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 28
- Issue:
- 24
- ISSN:
- 1094-4087; OPEXFF
- Page Range / eLocation ID:
- Article No. 35986
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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