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  • Unexpectedly large remanent polarization of Hf 0.5 Zr 0.5 O 2 metal–ferroelectric–metal capacitor fabricated without breaking vacuum
Title: Unexpectedly large remanent polarization of Hf 0.5 Zr 0.5 O 2 metal–ferroelectric–metal capacitor fabricated without breaking vacuum
Award ID(s):
1841466
PAR ID:
10208975
Author(s) / Creator(s):
; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Applied Physics Letters
Volume:
118
Issue:
1
ISSN:
0003-6951
Page Range / eLocation ID:
012903
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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