Multiphysics simulation of hypersensitive microbolometer sensor using vanadium dioxide and air suspension for millimeter wave imaging
- Award ID(s):
- 1845370
- PAR ID:
- 10209858
- Date Published:
- Journal Name:
- Microsystem technologies
- ISSN:
- 0946-7076
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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