While classical electrochemical impedance spectroscopy (EIS) focuses on measurements from a single working electrode, dense active microelectrode arrays offer opportunities for new modes of sensing. Here we present experimental results with an integrated sensor array for electrochemical imaging. The system uses a 100 x 100 custom CMOS electrode array with 10 micron pixels, which measures impedance at frequencies up to 100 MHz. The sensor chip is uniquely designed to take advantage of the electrostatic coupling between groups of nearby pixels to re-shape the local electric field. Multiple bias voltages and clock phases create new types of signal diversity that will enable enhanced sensing modes for computational imaging and impedance tomography.
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In-Line Microelectrode Arrays for Impedance Mapping of Microphysiological Systems
Herein, a 60-electrode array is fabricated down the length of a microchamber for analysis of a microphysiological system. The electrode array is fabricated by standard photolithographic, metallization, and etching techniques. Permutations of 2-wire impedance measurements (10 Hz to 1 MHz) are made along the length of the microchannel using a multiplexer, Gamry potentiostat, and custom Labview code. An impedance "heat map" is created via custom algorithms. Spatial resolution and mapping capabilities are exhibited using conductive NaCl solutions and 2D cell culture.
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- Award ID(s):
- 1846911
- NSF-PAR ID:
- 10212077
- Date Published:
- Journal Name:
- 2020 IEEE SENSORS
- Page Range / eLocation ID:
- 1 to 4
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1109/SENSORS47125.2020.9278636
