Beta gallium oxide (β‐Ga2O3) has emerged as a highly promising semiconductor material with an ultrawide bandgap ranging from 4.5 to 4.9 eV for future applications in power electronics, optoelectronics, as well as gas and ultraviolet (UV) radiation sensors. Here, surface adsorption and air damping behavior of doubly clamped β‐Ga2O3nanomechanical resonators are probed and systemically studied by measuring the resonance characteristics under different gas and pressure conditions. High responsivities of resonance to pressure are obtained by heating the devices up to 300 °C to induce an accelerated adsorption–desorption process. The initial surface conditions of the β‐Ga2O3thin film play important roles in affecting the resonant behavior. UV ozone treatment proves effective in altering the initial surface conditions of β‐Ga2O3nanosheets by eliminating physisorbed contaminants and filling oxygen vacancy defects residing on the surface, resulting in a consequential and discernible modification of the resonance behavior of β‐Ga2O3nanomechanical resonators. The surface adsorption and desorption processes in β‐Ga2O3demonstrate clear reversibility by exposing the UV treated β‐Ga2O3to air. This study attains first‐hand information on how the surface conditions of β‐Ga2O3affect its mechanical properties, and helps guide future development of transducers via β‐Ga2O3nanoelectromechanical systems (NEMS) for pressure sensing applications, especially in harsh environments.
- Award ID(s):
- 1830766
- NSF-PAR ID:
- 10212178
- Date Published:
- Journal Name:
- Scientific Reports
- Volume:
- 10
- Issue:
- 1
- ISSN:
- 2045-2322
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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Abstract -
null (Ed.)Gallium oxide (Ga 2 O 3 ) and its most stable modification, monoclinic β-Ga 2 O 3 , is emerging as a primary material for power electronic devices, gas sensors and optical devices due to a high breakdown voltage, large bandgap, and optical transparency combined with electrical conductivity. Growth of β-Ga 2 O 3 is challenging and most methods require very high temperatures. Nanowires of β-Ga 2 O 3 have been investigated extensively as they might be advantageous for devices such as nanowire field effect transistors, and gas sensors benefiting from a large surface to volume ratio, among others. Here, we report a synthesis approach using a sulfide precursor (Ga 2 S 3 ), which requires relatively low substrate temperatures and short growth times to produce high-quality single crystalline β-Ga 2 O 3 nanowires in high yields. Even though Au- or Ag-rich nanoparticles are invariably observed at the nanowire tips, they merely serve as nucleation seeds while the nanowire growth proceeds via supply and local oxidation of gallium at the substrate interface. Absorption and cathodoluminescence spectroscopy on individual nanowires confirms a wide bandgap of 4.63 eV and strong luminescence with a maximum ∼2.7 eV. Determining the growth process, morphology, composition and optoelectronic properties on the single nanowire level is key to further application of the β-Ga 2 O 3 nanowires in electronic devices.more » « less
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α-Ga2O3has the corundum structure analogous to that of α-Al2O3. The bandgap energy of α-Ga2O3is 5.3 eV and is greater than that of β-Ga2O3, making the α-phase attractive for devices that benefit from its wider bandgap. The O–H and O–D centers produced by the implantation of H+and D+into α-Ga2O3have been studied by infrared spectroscopy and complementary theory. An O–H line at 3269 cm−1is assigned to H complexed with a Ga vacancy (VGa), similar to the case of H trapped by an Al vacancy (VAl) in α-Al2O3. The isolated VGaand VAldefects in α-Ga2O3and α-Al2O3are found by theory to have a “shifted” vacancy-interstitial-vacancy equilibrium configuration, similar to VGain β-Ga2O3, which also has shifted structures. However, the addition of H causes the complex with H trapped at an unshifted vacancy to have the lowest energy in both α-Ga2O3and α-Al2O3.
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The hot-wall metalorganic chemical vapor deposition (MOCVD) concept, previously shown to enable superior material quality and high performance devices based on wide bandgap semiconductors, such as Ga(Al)N and SiC, has been applied to the epitaxial growth of β-Ga 2 O 3 . Epitaxial β-Ga 2 O 3 layers at high growth rates (above 1 μm/h), at low reagent flows, and at reduced growth temperatures (740 °C) are demonstrated. A high crystalline quality epitaxial material on a c-plane sapphire substrate is attained as corroborated by a combination of x-ray diffraction, high-resolution scanning transmission electron microscopy, and spectroscopic ellipsometry measurements. The hot-wall MOCVD process is transferred to homoepitaxy, and single-crystalline homoepitaxial β-Ga 2 O 3 layers are demonstrated with a [Formula: see text]01 rocking curve width of 118 arc sec, which is comparable to those of the edge-defined film-fed grown ([Formula: see text]01) β-Ga 2 O 3 substrates, indicative of similar dislocation densities for epilayers and substrates. Hence, hot-wall MOCVD is proposed as a prospective growth method to be further explored for the fabrication of β-Ga 2 O 3 .more » « less
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Abstract We report polarization dependent photoluminescence studies on unintentionally-, Mg-, and Ca-doped
β -Ga2O3bulk crystals grown by the Czochralski method. In particular, we observe a wavelength shift of the highest-energy UV emission which is dependent on the pump photon energy and polarization. For 240 nm (5.17 eV) excitation almost no shift of the UV emission is observed betweenE ||b andE ||c , while a shift of the UV emission centroid is clearly observed for 266 nm (4.66 eV), a photon energy lying between the band absorption onsets for the two polarizations. These results are consistent with UV emission originating from transitions between conduction band electrons and two differentially-populated self-trapped hole (STH) states. Calcuations based on hybrid and self-interaction-corrected density functional theories further validate that the polarization dependence is consistent with the relative stability of two STHs. This observation implies that the STHs form primarily at the oxygen atoms involved in the original photon absorption event, thus providing the connection between incident polarization and emission wavelength. The data imposes a lower bound on the energy separation between the self-trapped hole states of ~70–160 meV, which is supported by the calculations.
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1038/s41598-020-76967-6
