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The correction of aberrations in the scanning transmission electron microscope (STEM) has simultaneously improved both spatial and temporal resolution, making it possible to capture the dynamics of single atoms inside materials, and resulting in new insights into the dynamic behavior of materials. In this article, we describe the different beam–matter interactions that lead to atomic excitations by transferring energy and momentum. We review recent examples of sequential STEM imaging to demonstrate the dynamic behavior of single atoms both within materials, at dislocations, at grain and interface boundaries, and on surfaces. We also discuss the effects of such dynamic behavior on material properties. We end with a summary of ongoing instrumental and algorithm developments that we anticipate will improve the temporal resolution significantly, allowing unprecedented insights into the dynamic behavior of materials at the atomic scale.
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Electron ptychography achieves atomic-resolution limits set by lattice vibrations
Transmission electron microscopes use electrons with wavelengths of a few picometers, potentially capable of imaging individual atoms in solids at a resolution ultimately set by the intrinsic size of an atom. However, owing to lens aberrations and multiple scattering of electrons in the sample, the image resolution is reduced by a factor of 3 to 10. By inversely solving the multiple scattering problem and overcoming the electron-probe aberrations using electron ptychography, we demonstrate an instrumental blurring of less than 20 picometers and a linear phase response in thick samples. The measured widths of atomic columns are limited by thermal fluctuations of the atoms. Our method is also capable of locating embedded atomic dopant atoms in all three dimensions with subnanometer precision from only a single projection measurement.
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- Award ID(s):
- 1719875
- PAR ID:
- 10230251
- Publisher / Repository:
- American Association for the Advancement of Science (AAAS)
- Date Published:
- Journal Name:
- Science
- Volume:
- 372
- Issue:
- 6544
- ISSN:
- 0036-8075
- Page Range / eLocation ID:
- p. 826-831
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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