Electrostatic levitation: an elegant method to control MEMS switching operation
- Award ID(s):
- 1919608
- PAR ID:
- 10231958
- Date Published:
- Journal Name:
- Nonlinear Dynamics
- ISSN:
- 0924-090X
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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