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Title: High-Overtone Thin Film Ferroelectric AlScN-on-Silicon Composite Resonators
Award ID(s):
1944304
PAR ID:
10232796
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
IEEE Electron Device Letters
Volume:
42
Issue:
6
ISSN:
0741-3106
Page Range / eLocation ID:
911 to 914
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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