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Title: A Continuous, Impedimetric Parylene Flow Sensor
Award ID(s):
1827773
PAR ID:
10252553
Author(s) / Creator(s):
;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
30
Issue:
3
ISSN:
1057-7157
Page Range / eLocation ID:
456 to 470
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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