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Title: Residual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy
Authors:
 ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  
Award ID(s):
1841453 1841466
Publication Date:
NSF-PAR ID:
10279308
Journal Name:
Journal of Applied Physics
Volume:
130
Issue:
4
Page Range or eLocation-ID:
Article No. 044501
ISSN:
0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
National Science Foundation
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