Numerical integration of slope data with application to deflectometry
This work presents a stable noise-robust numerical integration technique derived from a gradient representation of the Q-Forbes polynomials for surfaces with axial symmetry. This modal-integration technique uses an orthogonalization process through the Householder reflections to obtain a numerically orthogonal set for the surface slopes that is used to reconstruct the surface shape. It is shown that for typical Deflectometry measurements, the resulting random component of the uncertainty after numerical integration has a root mean square error well below 1nm.
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- PAR ID:
- 10281502
- Date Published:
- Journal Name:
- SPIE Optical Engineering + Applications, 2020, Online Only
- Page Range / eLocation ID:
- 7
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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