Nozzleless Acoustic Droplet Ejector With Electrically Tunable Droplet Size for Picking and Placing Semiconductor Chips
- Award ID(s):
- 1716953
- PAR ID:
- 10283100
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 30
- Issue:
- 2
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 262 to 270
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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