In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis -Pt(CO) 2 Cl 2 . UHV surface studies have shown that high purity platinum deposits can be obtained from cis -Pt(CO) 2 Cl 2 . The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.
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Electron beam-induced deposition of platinum from Pt(CO) 2 Cl 2 and Pt(CO) 2 Br 2
Two platinum precursors, Pt(CO) 2 Cl 2 and Pt(CO) 2 Br 2 , were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a scanning electron microscope (SEM), wherein series of pillars were successfully grown from both precursors. The growth of the pillars was studied as a function of the electron dose and compared to deposits grown from the commercially available precursor MeCpPtMe 3 . The composition of the deposits was determined using energy-dispersive X-ray spectroscopy (EDX) and compared to the composition of deposits from MeCpPtMe 3 , as well as deposits made in an ultrahigh-vacuum (UHV) environment. A slight increase in metal content and a higher growth rate are achieved in the SEM for deposits from Pt(CO) 2 Cl 2 compared to MeCpPtMe 3 . However, deposits made from Pt(CO) 2 Br 2 show slightly less metal content and a lower growth rate compared to MeCpPtMe 3 . With both Pt(CO) 2 Cl 2 and Pt(CO) 2 Br 2 , a marked difference in composition was found between deposits made in the SEM and deposits made in UHV. In addition to Pt, the UHV deposits contained halogen species and little or no carbon, while the SEM deposits contained only small amounts of halogen species but high carbon content. Results from this study highlight the effect that deposition conditions can have on the composition of deposits created by FEBID.
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- NSF-PAR ID:
- 10292527
- Date Published:
- Journal Name:
- Beilstein Journal of Nanotechnology
- Volume:
- 11
- ISSN:
- 2190-4286
- Page Range / eLocation ID:
- 1789 to 1800
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.3762/bjnano.11.161
