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Title: Facile micro-fabrication techniques for rapid manufacturing of gallium-based liquid metal passive frequency selective surfaces
This presentation reports different methods of making gallium-based liquid metal (LM) microfluidics passive frequency selective surfaces (FSS). In the first method Si wafer was dry-etched to form a mold and PDMS was replicated from the Si mold to create microfluidic channels with 5x5 array of 300μm width and 200 μm height for Jerusalem cross bars structure, surrounded by four fixed 2 x 1 x 0.2 mm structures. A PDMS lid having 1 mm diameter holes obtained from SLA 3D printed pillar array was aligned and bonded to the replicated PDMS to create sealed microfluidic channels. The bonded structure was placed with lid upwards in an open top 3D printed container measuring 64mm x 64mmarea and 25 mm height. LM was flooded into the container and loaded in Temescal e-beam evaporator at atmospheric pressure. Pressure in evaporator was dropped to 5.75 x 10-6Torr. After a vacuum period of 2 hours LM filling takes place in microfluidic structures because of positive pressure differential introduced by atmospheric pressure. In second method 70 μmthick SU8-2075 stencil consisting of a patterned 1x1 array of see-through FSS structure of above-mentioned dimensions was released from oxidized Si wafer using7:1 BOE. The SU8-2075 stencil was placed over a more » partially cured PDMS. After complete PDMS curing, an airbrush filled with LM operating at 36 psi with spraying time of less than 5 seconds, placed 4-5 cm over the stencil yields the patterned 1x1 FSS structure after removal of SU8-2075. « less
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The 5-6th Thermal and Fluids Engineering Conference
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National Science Foundation
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