Sheil, Ryan, Martirez, J. Mark, Sang, Xia, Carter, Emily A., and Chang, Jane P. Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation. Retrieved from https://par.nsf.gov/biblio/10293097. The Journal of Physical Chemistry C 125.3 Web. doi:10.1021/acs.jpcc.0c08932.

Sheil, Ryan, Martirez, J. Mark, Sang, Xia, Carter, Emily A., & Chang, Jane P. Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation. The Journal of Physical Chemistry C, 125 (3). Retrieved from https://par.nsf.gov/biblio/10293097. https://doi.org/10.1021/acs.jpcc.0c08932

Sheil, Ryan, Martirez, J. Mark, Sang, Xia, Carter, Emily A., and Chang, Jane P. "Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation". The Journal of Physical Chemistry C 125 (3). Country unknown/Code not available. https://doi.org/10.1021/acs.jpcc.0c08932. https://par.nsf.gov/biblio/10293097.

@article{osti_10293097,
place = {Country unknown/Code not available}, title = {Precise Control of Nanoscale Cu Etching via Gas-Phase Oxidation and Chemical Complexation}, url = {https://par.nsf.gov/biblio/10293097}, DOI = {10.1021/acs.jpcc.0c08932}, abstractNote = {}, journal = {The Journal of Physical Chemistry C}, volume = {125}, number = {3}, author = {Sheil, Ryan and Martirez, J. Mark and Sang, Xia and Carter, Emily A. and Chang, Jane P.}, editor = {null} }