Freeform optics can reduce the cost, weight, and size of advanced imaging systems,
but it is challenging to manufacture the complex rotationally asymmetric surfaces to optical
tolerances. To address the need for disruptive, high-precision sub-aperture forming and finishing
techniques for freeform optics, we investigate an alternative, non-contact polishing methodology
using femtosecond lasers, combining modeling, experiments, and demonstrations. Femtosecondlaser-
based polishing of germanium was investigated using an experimentally-validated twotemperature
model of laser/germanium interaction to guide the understanding and selection of
laser parameters to achieve near-nonthermal ablation for polishing and figuring. For the first time
to our knowledge, model-guided femtosecond laser polishing of germanium was successfully
demonstrated, achieving precision material removal while maintaining single-digit nanometer
optical surface quality. The demonstrated femtosecond-laser-based polishing technique lays the
foundation for semiconductor optics polishing/fabrication using femtosecond lasers and opens a
viable path for high-precision, complex sub-aperture optical polishing tasks on various materials.
© 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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Increased Laser Polishing Rates of LPBF Components: High path overlaps to reduce surface features at laser polishing of LPBF components with high process speeds
- Award ID(s):
- 1727366
- PAR ID:
- 10298033
- Date Published:
- Journal Name:
- PhotonicsViews
- Volume:
- 18
- Issue:
- S1
- ISSN:
- 2626-1294
- Page Range / eLocation ID:
- 22 to 23
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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