Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf 1- x Zr x O 2 thin films
- Award ID(s):
- 2006231
- NSF-PAR ID:
- 10303938
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 118
- Issue:
- 10
- ISSN:
- 0003-6951
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation