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Title: Compositional and phase dependence of elastic modulus of crystalline and amorphous Hf 1- x Zr x O 2 thin films
Authors:
 ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  
Award ID(s):
2006231
Publication Date:
NSF-PAR ID:
10303938
Journal Name:
Applied Physics Letters
Volume:
118
Issue:
10
ISSN:
0003-6951
Sponsoring Org:
National Science Foundation
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