Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition
- Award ID(s):
- 1905862
- PAR ID:
- 10304020
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology B
- Volume:
- 39
- Issue:
- 5
- ISSN:
- 2166-2746
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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