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Title: Tunable and scalable fabrication of plasmonic dimer arrays with sub-10 nm nanogaps by area-selective atomic layer deposition
Award ID(s):
1905862
PAR ID:
10304020
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  
Date Published:
Journal Name:
Journal of Vacuum Science & Technology B
Volume:
39
Issue:
5
ISSN:
2166-2746
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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