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Title: Micromachined two-axis water-immersible scanning mirror using torsional and bending hinges
Award ID(s):
2036134
PAR ID:
10314885
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
Journal of Optical Microsystems
Volume:
1
Issue:
04
ISSN:
2708-5260
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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