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Title: A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments
Award ID(s):
1946231
NSF-PAR ID:
10319395
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
Applied Surface Science
Volume:
570
Issue:
C
ISSN:
0169-4332
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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