A combined molecular dynamics/Monte Carlo simulation of Cu thin film growth on TiN substrates: Illustration of growth mechanisms and comparison with experiments
- Award ID(s):
- 1946231
- NSF-PAR ID:
- 10319395
- Date Published:
- Journal Name:
- Applied Surface Science
- Volume:
- 570
- Issue:
- C
- ISSN:
- 0169-4332
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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