Similarity evaluation of 3D topological measurement results using statistical methods
- Award ID(s):
- 1757900
- PAR ID:
- 10324554
- Editor(s):
- Zhang, Song; Harding, Kevin G.
- Date Published:
- Journal Name:
- Dimensional Optical Metrology and Inspection for Practical Applications IX
- Volume:
- 11397
- Page Range / eLocation ID:
- 113970A
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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