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Title: A MEMS Pressure Sensor Using Electrostatic Levitation
Award ID(s):
1919608
PAR ID:
10327400
Author(s) / Creator(s):
; ;
Date Published:
Journal Name:
IEEE Sensors Journal
Volume:
21
Issue:
17
ISSN:
1530-437X
Page Range / eLocation ID:
18601 to 18608
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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