Bidney, Grant W., Jin, Boya, Deguzman, Lou, Hutchens, Thomas C., Duran, Joshua M., Ariyawansa, Gamini, Anisimov, Igor, Limberopoulos, Nicholaos I., Urbas, Augustine M., Allen, Kenneth W., Gunapala, Sarath D., and Astratov, Vasily N. Anisotropic Wet Etching of Si as a Fabrication Tool Enabling 3-D Microphotonics Structures and Devices. Retrieved from https://par.nsf.gov/biblio/10331024. NAECON 2021 - IEEE National Aerospace and Electronics Conference . Web. doi:10.1109/NAECON49338.2021.9696393.

Bidney, Grant W., Jin, Boya, Deguzman, Lou, Hutchens, Thomas C., Duran, Joshua M., Ariyawansa, Gamini, Anisimov, Igor, Limberopoulos, Nicholaos I., Urbas, Augustine M., Allen, Kenneth W., Gunapala, Sarath D., & Astratov, Vasily N. Anisotropic Wet Etching of Si as a Fabrication Tool Enabling 3-D Microphotonics Structures and Devices. NAECON 2021 - IEEE National Aerospace and Electronics Conference, (). Retrieved from https://par.nsf.gov/biblio/10331024. https://doi.org/10.1109/NAECON49338.2021.9696393

Bidney, Grant W., Jin, Boya, Deguzman, Lou, Hutchens, Thomas C., Duran, Joshua M., Ariyawansa, Gamini, Anisimov, Igor, Limberopoulos, Nicholaos I., Urbas, Augustine M., Allen, Kenneth W., Gunapala, Sarath D., and Astratov, Vasily N. "Anisotropic Wet Etching of Si as a Fabrication Tool Enabling 3-D Microphotonics Structures and Devices". NAECON 2021 - IEEE National Aerospace and Electronics Conference (). Country unknown/Code not available. https://doi.org/10.1109/NAECON49338.2021.9696393. https://par.nsf.gov/biblio/10331024.

@article{osti_10331024,
place = {Country unknown/Code not available}, title = {Anisotropic Wet Etching of Si as a Fabrication Tool Enabling 3-D Microphotonics Structures and Devices}, url = {https://par.nsf.gov/biblio/10331024}, DOI = {10.1109/NAECON49338.2021.9696393}, abstractNote = {}, journal = {NAECON 2021 - IEEE National Aerospace and Electronics Conference}, author = {Bidney, Grant W. and Jin, Boya and Deguzman, Lou and Hutchens, Thomas C. and Duran, Joshua M. and Ariyawansa, Gamini and Anisimov, Igor and Limberopoulos, Nicholaos I. and Urbas, Augustine M. and Allen, Kenneth W. and Gunapala, Sarath D. and Astratov, Vasily N.}, }