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Title: Transparent and passive Ta–Si–N thin films barrier layer
Award ID(s):
2000174
PAR ID:
10331151
Author(s) / Creator(s):
; ; ; ;
Date Published:
Journal Name:
MRS Communications
Volume:
11
Issue:
6
ISSN:
2159-6859
Page Range / eLocation ID:
950 to 954
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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