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  • Electric field reversals resulting from voltage waveform tailoring in Ar/O 2 capacitively coupled plasmas sustained in asymmetric systems
Title: Electric field reversals resulting from voltage waveform tailoring in Ar/O 2 capacitively coupled plasmas sustained in asymmetric systems
Award ID(s):
2009219
PAR ID:
10337200
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Plasma Sources Science and Technology
Volume:
30
Issue:
8
ISSN:
0963-0252
Page Range / eLocation ID:
085002
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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