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Title: Volumetric microfabrication of helical structures for industrial applications
Award ID(s):
1711356 1846671
NSF-PAR ID:
10341065
Author(s) / Creator(s):
; ; ; ; ; ;
Editor(s):
Panning, Eric M.; Liddle, J. Alexander
Date Published:
Journal Name:
Novel Patterning Technologies 2022 (Conf. 12054), held as part of the 2022 SPIE Advanced Lithography and Patterning meeting
Volume:
12054
Page Range / eLocation ID:
1205409-1 - 1205409-7
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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