Volumetric microfabrication of helical structures for industrial applications
- NSF-PAR ID:
- 10341065
- Editor(s):
- Panning, Eric M.; Liddle, J. Alexander
- Date Published:
- Journal Name:
- Novel Patterning Technologies 2022 (Conf. 12054), held as part of the 2022 SPIE Advanced Lithography and Patterning meeting
- Volume:
- 12054
- Page Range / eLocation ID:
- 1205409-1 - 1205409-7
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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