Variation and Stochasticity in Polycrystalline HZO based MFIM: Grain-Growth Coupled 3D Phase Field Model based Analysis
- Award ID(s):
- 2008412
- NSF-PAR ID:
- 10345910
- Date Published:
- Journal Name:
- International Electron Device Meetings (IEDM)
- Page Range / eLocation ID:
- 15.2.1 to 15.2.4
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation