Layer-resolved release of epitaxial layers in III-V heterostructure via a buffer-free mechanical separation technique
Epi-layers of III-V heterostructures can be selectively released at target interfaces without an embedded sacrificial buffer.
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- Award ID(s):
- 1931088
- PAR ID:
- 10347714
- Date Published:
- Journal Name:
- Science Advances
- Volume:
- 8
- Issue:
- 3
- ISSN:
- 2375-2548
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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