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Title: Materials and Device Strategies for Nanoelectronic 3D Heterogeneous Integration
Award ID(s):
1917025
PAR ID:
10351444
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
IEEE International Conference on Simulation of Semiconductor Processes and Devices
Page Range / eLocation ID:
163 to 166
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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