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Abstract Carbon-doped silicon oxide (CDO) thin films as low dielectric constant materials were deposited on both n-type silicon (Si) (100) and indium tin oxide coated polyethylene naphthalate (ITO/PEN) substrates, using the plasma-enhanced chemical vapor deposition of tetrakis(trimethylsilyoxy)silane (TTMSS) precursor. Chemical structures of the CDO films were analyzed by using FTIR (Fourier transformation infrared) spectroscopy and XPS (X-ray photoelectron spectroscopy). The chemical bonds related with hydrocarbon and Si–O were the main characteristics of the CDO films. The prominent peaks from the FTIR spectra included Si–O–Si stretching, Si–CH3 bending, Si–(CH3)x stretching, and CHx stretching modes. XPS spectra composed of the O1s, C1s, and Si2p electron orbitals were used to quantitatively analyze the elemental composition of the CDO films. The growth mechanisms of CDO films were dependent on the substrate type. For the ITO/PEN substrate, the lack of Si atoms on the ITO surface made difficulty in forming initial Si–O bonds, resulting in insufficient Si–O–Si structure. In comparison, the CDO films could grow easily on Si substrates due to pre-existing Si–O bonds on the surface. The chemical structures of the CDO films are expected to affect electrical and mechanical performances.
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Characterization of Calcium Silicate Hydrate Gels with Different Calcium to Silica Ratios and Polymer Modifications
Calcium silicate hydrate (CSH) gels, the main binding phases of hydrated cement, are the most widely utilized synthetic materials. To understand the influences of composition and polymers on the reaction kinetics and phase formation, CSH gels with varying Ca/Si ratios and amounts of poly (acrylamide-co-acrylic acid) partial sodium salt (PAAm-co-PAA) were synthesized via a direct method. The CSH gels were characterized through isothermal calorimetry, thermogravimetric analysis (TGA), X-ray diffraction (XRD), Fourier-transform infrared spectroscopy (FTIR), and Raman spectroscopy at different ages. By increasing the Ca/Si ratio from 0.8 to 1.0, the formation of CSH was enhanced with a 5.4% lower activation energy, whereas the incorporation of PAAm-co-PAA increased the temperature sensitivity of the reactions with an 83.3% higher activation energy. In the presence of PAAm-co-PAA, the reaction rate was retarded at an early age and the negative impact faded over time. The results of an XRD analysis indicated the formation of tobermorite as the main phase of the CSH gels, while the addition of PAAm-co-PAA resulted in a postponed calcium hydroxide consumption and CSH formation, which was confirmed by the decreased FTIR intensity of the C=O bond, Si–O stretching and Si–O bonds. The increased Raman vibrations of Si–O–Si bending Q2, Ca–O bonds, O–Si–O and asymmetric bending vibrations of SiO4 tetrahedra in the presence of PAAm-co-PAA indicate the intercalation of the polymeric phase and internal deformation of CSH gels.
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- Award ID(s):
- 1935799
- PAR ID:
- 10352160
- Date Published:
- Journal Name:
- Gels
- Volume:
- 8
- Issue:
- 2
- ISSN:
- 2310-2861
- Page Range / eLocation ID:
- 75
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.3390/gels8020075
