Characterizing vibration-assisted atomic force microscopy (AFM)-based nanomachining via perception of acoustic emission phenomena using a sensor-based real-time monitoring approach
- Award ID(s):
- 2006127
- PAR ID:
- 10355540
- Date Published:
- Journal Name:
- Manufacturing Letters
- Volume:
- 34
- Issue:
- C
- ISSN:
- 2213-8463
- Page Range / eLocation ID:
- 6 to 11
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation