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Title: Effects of Remote Boundary Conditions on Clamping Loss in Micromechanical Resonators
Award ID(s):
1662500 1662619
NSF-PAR ID:
10358268
Author(s) / Creator(s):
; ; ; ; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
31
Issue:
2
ISSN:
1057-7157
Page Range / eLocation ID:
204 to 216
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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