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Title: Many routes to ferroelectric HfO 2 : A review of current deposition methods
Award ID(s):
1841466 1634955 1841453
PAR ID:
10360716
Author(s) / Creator(s):
 ;  ;  ;  ;  ;  ;  ;  ;  
Publisher / Repository:
American Vacuum Society
Date Published:
Journal Name:
Journal of Vacuum Science & Technology A
Volume:
40
Issue:
1
ISSN:
0734-2101
Page Range / eLocation ID:
Article No. 010803
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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