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Title: Structural and mechanical properties of nanocrystalline Ga 2 O 3 films made by pulsed laser deposition onto transparent quartz substrates

This work reports on the correlation between structure, surface/interface morphology and mechanical properties of pulsed laser deposited (PLD)β-Ga2O3films on transparent quartz substrates. By varying the deposition temperature in the range of 25 °C–700 °C, ∼200 nm thick Ga2O3films with variable microstructure and amorphous-to-nanocrystalline nature were produced onto quartz substrates by PLD. The Ga2O3films deposited at room temperature were amorphous; nanocrystalline Ga2O3films were realized at 700 °C. The interface microstructure is characterized with a typical nano-columnar morphology while the surface exhibits the uniform granular morphology. Corroborating with structure and surface/interface morphology, and with increasing deposition temperature, tunable mechanical properties were seen in PLD Ga2O3films. At 700 °C, for nanocrystalline Ga2O3films, the dense grain packing reduces the elastic modulus Erwhile improving the hardness. The improved crystallinity at elevated temperatures coupled with nanocrystallinity, theβ-phase stabilization is accounted for the observed enhancement in the mechanical properties of PLD Ga2O3films. The structure-morphology-mechanical property correlation in nanocrystalline PLDβ-Ga2O3films deposited on quartz substrates is discussed in detail.

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Nano Express
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Article No. 020006
IOP Publishing
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National Science Foundation
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