Oyakhire, Solomon T., Ablat, Hayrensa, Richey, Nathaniel E., and Bent, Stacey F. Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition. Journal of Vacuum Science & Technology A 40.2 Web. doi:10.1116/6.0001505.

Oyakhire, Solomon T., Ablat, Hayrensa, Richey, Nathaniel E., & Bent, Stacey F. Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition. Journal of Vacuum Science & Technology A, 40 (2). https://doi.org/10.1116/6.0001505

Oyakhire, Solomon T., Ablat, Hayrensa, Richey, Nathaniel E., and Bent, Stacey F. "Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition". Journal of Vacuum Science & Technology A 40 (2). Country unknown/Code not available: American Vacuum Society. https://doi.org/10.1116/6.0001505. https://par.nsf.gov/biblio/10361993.

@article{osti_10361993,
place = {Country unknown/Code not available}, title = {Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition}, url = {https://par.nsf.gov/biblio/10361993}, DOI = {10.1116/6.0001505}, abstractNote = {Not Available}, journal = {Journal of Vacuum Science & Technology A}, volume = {40}, number = {2}, publisher = {American Vacuum Society}, author = {Oyakhire, Solomon T. and Ablat, Hayrensa and Richey, Nathaniel E. and Bent, Stacey F.}, }