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Title: Realization of efficient 3D tapered waveguide-to-fiber couplers on a nanophotonic circuit
We report the realization of efficiently coupled 3D tapered waveguide-to-fiber couplers (TWCs) based on standard lithography techniques. The 3D TWC design is capable of achieving highly efficient flat-cleaved fiber to silicon nitride photonic waveguide coupling, withT ≈ 95 % polarization-insensitive coupling efficiency, wide bandwidth, and good misalignment tolerance. Our fabricated 3D TWCs on a functional nanophotonic circuit achieveT ≈ 85% coupling efficiency. Beyond applications in high-efficiency photon coupling, the demonstrated 3D lithography technique provides a complementary approach for mode field shaping and effective refractive index engineering, potentially useful for general applications in integrated photonic circuits.  more » « less
Award ID(s):
2134931
PAR ID:
10369761
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
Optical Society of America
Date Published:
Journal Name:
Optics Express
Volume:
30
Issue:
18
ISSN:
1094-4087; OPEXFF
Format(s):
Medium: X Size: Article No. 31643
Size(s):
Article No. 31643
Sponsoring Org:
National Science Foundation
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