Epitaxial Bonding and Transfer Processes for Large-Scale Heterogeneously Integrated Electronic-Photonic Circuitry
- Award ID(s):
- 1640196
- PAR ID:
- 10379668
- Date Published:
- Journal Name:
- Journal of The Electrochemical Society
- Volume:
- 166
- Issue:
- 1
- ISSN:
- 0013-4651
- Page Range / eLocation ID:
- D3158 to D3166
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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