This work reports a three-dimensional polymer interdigitated pillar electrostatic actuator that can produce force densities 5–10× higher than those of biological muscles. The theory of operation, scaling, and stability is investigated using analytical and FEM models. The actuator consists of two high-density arrays of interdigitated pillars that work against a restoring force generated by an integrated flexure spring. The actuator architecture enables linear actuation with higher displacements and pull-in free actuation to prevent the in-use stiction associated with other electrostatic actuators. The pillars and springs are 3D printed together in the same structure. The pillars are coated with a gold–palladium alloy layer to form conductive electrodes. The space between the pillars is filled with liquid dielectrics for higher breakdown voltages and larger electrostatic forces due to the increase in the dielectric constant. We demonstrated a prototype actuator that produced a maximum work density of 54.6 µJ/cc and an electrical-to-mechanical energy coupling factor of 32% when actuated at 4000 V. The device was operated for more than 100,000 cycles with no degradation in displacements. The flexible polymer body was robust, allowing the actuator to operate even after high mechanical force impact, which was demonstrated by operation after drop tests. As it is scaled further, the reported actuator will enable soft and flexible muscle-like actuators that can be stacked in series and parallel to scale the resulting forces. This work paves the way for high-energy density actuators for microrobotic applications.
This work presents a new class of micromachined electrostatic actuators capable of producing output force and displacement unprecedented for MEMS electrostatic actuators. The actuators feature submicron high aspect ratio transduction gaps lined up in two-dimensional arrays. Such an arrangement of microscale actuator cells allows the addition of force and displacements of a large number of cells (up to 7600 in one demonstrated array), leading to displacements ranging in the hundreds of microns and several gram forces of axial force. For 50 µm thick actuators with horizontal dimensions in the 1–4 millimeter range, an out-of-plane displacement of up to 678 µm at 46 V, a bending moment of up to 2.0 µNm, i.e., 0.08 N (~8 gram-force) of axial force over a 50 µm by 2 mm cross-sectional area of the actuator (800 kPa of electrostatically generated stress), and an energy density (mechanical work output per stroke per volume) up to 1.42 mJ/cm3was demonstrated for the actuators.
more » « less- NSF-PAR ID:
- 10381536
- Publisher / Repository:
- Nature Publishing Group
- Date Published:
- Journal Name:
- Microsystems & Nanoengineering
- Volume:
- 8
- Issue:
- 1
- ISSN:
- 2055-7434
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
More Like this
-
more » « less
Abstract -
more » « less
Abstract Dimensional change in a solid due to electrochemically driven compositional change is termed electro‐chemo‐mechanical (ECM) coupling. This effect causes mechanical instability in Li‐ion batteries and solid oxide fuel cells. Nevertheless, it can generate considerable force and deformation, making it attractive for mechanical actuation. Here a Si‐compatible ECM actuator in the form of a 2 mm diameter membrane is demonstrated. Actuation results from oxygen ion transfer between two 0.1
µ m thick Ti oxide\Ce0.8Gd0.2O1.9nanocomposite layers separated by a 1.5µ m thick Ce0.8Gd0.2O1.9solid electrolyte. The chemical reaction responsible for stress generation is electrochemical oxidation/reduction in the composites. Under ambient conditions, application of 5 V DC produces actuator response within seconds, generating vertical displacement of several µm with calculated stress≈ 3.5 MPa. The membrane actuator preserves its final mechanical state for more than 1 h following voltage removal. These characteristics uniquely suit ECM actuators for room temperature applications in Si‐integrated microelectromechanical systems. -
more » « less
Abstract Tuning and reconfiguring of nanophotonic components are needed to realize systems incorporating many components. The electrostatic force can deform a structure and tune its optical response. Despite the success of electrostatic actuators, they suffer from trade-offs between tuning voltage, tuning range, and on-chip area. Piezoelectric actuation could resolve these challenges, but only pm-per-volt scale wavelength tunability has been achieved. Here we propose and demonstrate compact piezoelectric actuators, called nanobenders, that transduce tens of nanometers per volt. By leveraging the non-uniform electric field from submicron electrodes, we generate bending of a piezoelectric nanobeam. Combined with a sliced photonic crystal cavity to sense displacement, we show tuning of an optical resonance by ~ 5 nm V−1 (0.6 THz V−1) and between 1520 ~ 1560 nm (~ 400 linewidths) within 4 V. Finally, we consider tunable nanophotonic components enabled by the nanobenders.
-
more » « less
Abstract The impressive locomotion and manipulation capabilities of spiders have led to a host of bioinspired robotic designs aiming to reproduce their functionalities; however, current actuation mechanisms are deficient in either speed, force output, displacement, or efficiency. Here—using inspiration from the hydraulic mechanism used in spider legs—soft‐actuated joints are developed that use electrostatic forces to locally pressurize a hydraulic fluid, and cause flexion of a segmented structure. The result is a lightweight, low‐profile articulating mechanism capable of fast operation, high forces, and large displacement; these devices are termed spider‐inspired electrohydraulic soft‐actuated (SES) joints. SES joints with rotation angles up to 70°, blocked torques up to 70 mN m, and specific torques up to 21 N m kg−1are demonstrated. SES joints demonstrate high speed operation, with measured roll‐off frequencies up to 24 Hz and specific power as high as 230 W kg−1—similar to human muscle. The versatility of these devices is illustrated by combining SES joints to create a bidirectional joint, an artificial limb with independently addressable joints, and a compliant gripper. The lightweight, low‐profile design, and high performance of these devices, makes them well‐suited toward the development of articulating robotic systems that can rapidly maneuver.
-
null (Ed.)Current designs of powered prosthetic limbs are limited by the nearly exclusive use of DC motor technology. Soft actuators promise new design freedom to create prosthetic limbs which more closely mimic intact neuromuscular systems and improve the capabilities of prosthetic users. This work evaluates the performance of a hydraulically amplified self-healing electrostatic (HASEL) soft actuator for use in a prosthetic hand. We compare a linearly-contracting HASEL actuator, termed a Peano-HASEL, to an existing actuator (DC motor) when driving a prosthetic finger like those utilized in multi-functional prosthetic hands. A kinematic model of the prosthetic finger is developed and validated, and is used to customize a prosthetic finger that is tuned to complement the force-strain characteristics of the Peano-HASEL actuators. An analytical model is used to inform the design of an improved Peano-HASEL actuator with the goal of increasing the fingertip pinch force of the prosthetic finger. When compared to a weight-matched DC motor actuator, the Peano-HASEL and custom finger is 10.6 times faster, has 11.1 times higher bandwidth, and consumes 8.7 times less electrical energy to grasp. It reaches 91% of the maximum range of motion of the original finger. However, the DC motor actuator produces 10 times the fingertip force at a relevant grip position. In this body of work, we present ways to further increase the force output of the Peano-HASEL driven prosthetic finger system, and discuss the significance of the unique properties of Peano-HASELs when applied to the field of upper-limb prosthetic design. This approach toward clinically-relevant actuator performance paired with a substantially different form-factor compared to DC motors presents new opportunities to advance the field of prosthetic limb design.more » « less
