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Title: Influence of Clamping Loss and Electrical Damping On Nonlinear Dissipation in Micromechanical Resonators
Award ID(s):
1662619
NSF-PAR ID:
10386063
Author(s) / Creator(s):
; ; ; ; ; ; ;
Date Published:
Journal Name:
2022 IEEE International Conference on Micro Electro Mechanical Systems
Page Range / eLocation ID:
507 to 510
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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