Influence of Clamping Loss and Electrical Damping On Nonlinear Dissipation in Micromechanical Resonators
- Award ID(s):
- 1662619
- Publication Date:
- NSF-PAR ID:
- 10386063
- Journal Name:
- 2022 IEEE International Conference on Micro Electro Mechanical Systems
- Page Range or eLocation-ID:
- 507 to 510
- Sponsoring Org:
- National Science Foundation
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