We fabricate waveguides in Corning® flexible glass using Femtosecond Laser Micromachining (FLM) and visualize the ultrafast plasma dynamics which lead to waveguide formation via time-resolved interferometry. Due to minimal thermal effects and highly-nonlinear optical processes [1], FLM is an ideal tool to fabricate waveguides in glass with high precision and without post processing. We optimize laser fabrication of waveguides by varying scanning speed and pulse energy and, in particular, achieve waveguides with circular cross-sections using slit beam shaping [2]. Further optimization requires investigation of the underlying dynamics of how structural changes in glass are made during and after laser-glass interactions. Thus, we visualize the creation and recombination of plasma in glass which leads to the formation of waveguides using time- resolved interferometry [3].
[1] Rafael R. Gattass and Eric Mazur, Nature Photonics 2, 219–225 (2008)); [2] M. Ams et al. Opt. Express 13, 5676-5681 (2005); [3] G. C. Nagar, D. Dempsey, and B. Shim, Communications Physics 4, 96 (2021).
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High Aspect Ratio Glass Microstructures by Laser Induced Etching
Laser Induced Deep Etching (LIDE®), developed by LPKF, is a maskless laser processing method capable of patterning glass microstructures similar to microfluidics created by PDMS soft lithography. Here, we demonstrate a self-digitized droplet microfluidics chip with high aspect-ratio features and fine resolution via the LIDE® technology. LIDE® provides the means to translate microfluidic designs into glass in a process suitable for low-cost and high-volume manufacturing.
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- Award ID(s):
- 1841509
- NSF-PAR ID:
- 10390308
- Date Published:
- Journal Name:
- IEEE EMBS Micro and Nanotechnology in Medicine Conference (MNMC)
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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We measure the nonlinear index of refraction (n2) and investigate plasma dynamics in flexible Corning® Willow® Glass using single-shot Frequency Domain Holography (FDH). Flexible glass has received a lot of attention recently due to various applications such as 3-D photonics and wearable devices. Femtosecond laser micromachining (FLM) is a viable tool to fabricate these devices because of minimal thermal effects and thus enables fabrication of small and clean 3-D structures. To control and understand the underlying dynamics of FLM, ultrafast visualization of plasma and optical Kerr effect is important. FDH is a robust femtosecond time-resolved technique in which chirped reference and probe pulses centered at 404 nm are used to measure and visualize the plasma and Kerr effect produced by an intense, ultrashort pump pulse centered at 808 nm. Using FDH, we study laser-matter interactions in Willow Glass and measure its n2 to be 3.41 +/-0.08 ×10-16 cm2/W and visualize the plasma dynamics.more » « less
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We visualize material modification during laser micromachining, in particular, laser waveguide fabrication in flexible Corning® Willow® Glass via time-resolved interferometry, and single-shot frequency-domain holography which is a robust technique for studying permanent material change/damage.more » « less
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