Molecular beam homoepitaxy of N-polar AlN: Enabling role of aluminum-assisted surface cleaning
Atomic surface cleaning has enabled successful growth of ultrawide bandgap nitrogen-polar aluminum nitride semiconductors.
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- Award ID(s):
- 1719875
- NSF-PAR ID:
- 10411454
- Date Published:
- Journal Name:
- Science Advances
- Volume:
- 8
- Issue:
- 36
- ISSN:
- 2375-2548
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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