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Title: Molecular beam homoepitaxy of N-polar AlN: Enabling role of aluminum-assisted surface cleaning
Atomic surface cleaning has enabled successful growth of ultrawide bandgap nitrogen-polar aluminum nitride semiconductors.  more » « less
Award ID(s):
1719875
NSF-PAR ID:
10411454
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ;
Date Published:
Journal Name:
Science Advances
Volume:
8
Issue:
36
ISSN:
2375-2548
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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