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Title: Modular Synthesis of Phthalaldehyde Derivatives Enabling Access to Photoacid Generator-Bound Self-Immolative Polymer Resists with Next-Generation Photolithographic Properties
Award ID(s):
1719875
NSF-PAR ID:
10411622
Author(s) / Creator(s):
; ; ;
Date Published:
Journal Name:
Journal of the American Chemical Society
Volume:
144
Issue:
42
ISSN:
0002-7863
Page Range / eLocation ID:
19508 to 19520
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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