Modular Synthesis of Phthalaldehyde Derivatives Enabling Access to Photoacid Generator-Bound Self-Immolative Polymer Resists with Next-Generation Photolithographic Properties
- Award ID(s):
- 1719875
- PAR ID:
- 10411622
- Date Published:
- Journal Name:
- Journal of the American Chemical Society
- Volume:
- 144
- Issue:
- 42
- ISSN:
- 0002-7863
- Page Range / eLocation ID:
- 19508 to 19520
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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